Gas Abatement
High-efficiency industrial scrubbers are indispensable components of modern semiconductor and photovoltaic (solar) manufacturing infrastructures. Designed to manage the aggressive and toxic gas streams produced during wafer fabrication and cell processing, these scrubber systems effectively isolate and neutralize harmful pollutants, acidic vapors, and sub-micron particulates.
At AEC Solutions Pte Ltd, by delivering reliable exhaust gas abatement system to customer, our advanced scrubbing technology ensures optimal workplace safety, protects capital equipment from corrosive damage, and guarantees the compliance with environmental emission standards.
1st Generation
Water Washing Type:
Room temperature processing capacity is very high, processing efficiency is very limited, can not process non-water-soluble gases, can only process water-soluble gases.
Room temperature processing capacity is very high, processing efficiency is very limited, can not process non-water-soluble gases, can only process water-soluble gases.
2nd Generation
Adsorption Type: Room temperature, high processing capacity, separate adsorbent material is used according to the gas, and the cost of dry adsorbent material is very high.
3rd Generation
Electric heating, combustion type -800℃-1300℃, high processing capacity, very high processing efficiency, but PFC gas processing efficiency is very low.
4th Generation
Plasma Type: >3000℃, Thermal Plasma's representative characteristics are high chemical activity and high processing efficiency in a short time. Very low operation cost, ease of use, operation safety verification, technology to reduce harmful gases, improve corrosion resistance, prevent POWDER stacking technology, etc. to improve the continuity of operation.
For more details, please contact us.
